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Particle Removal Capacity Beyond the Limits
of the Microscopic World.
A patented Ultrasonic Pressure, Vacuum, Ultrasonic Pressure design combined with very high ultrasonic output power provides unparalleled cleaning effectiveness. The new UVU-F is the most effective dry cleaning system available for flat materials.
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| Features |
- 100% removal of particles down to 1.6 μm.
- The dry cleaning system does not require high cost consumables such as DI water or chemical solvents. Subsequent drying is not required, resulting in decreased process costs.
- Non-contact system will not scratch or damage the material.
- The closed loop system will not disrupt the air balance in such process area as clean rooms.
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| Principle |
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| Cleaing Test and Results |
The test was conducted in our Class 100 Clean Room.
The test results show that particles of 1.6 μm spacer beads were 100% removed at operating pressure of 14 kPa. |
Test details
*Substrate : Glass for LCD (320 mm x 400 mm)
*Particles :
a) 1.6 μm spacer beads (sprayed on dry)
b) glass particles
*Pressure range : 14 kPa
*Clearence between cleaning head and substrate : Approx. 1.5 mm
*Line speed : 100 mm/sec
*Evaluation : Microscopic photos |
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