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Cleaning System

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VUV-F Type/ Ultrasonic Dry Type Cleaner for Flat Materials
VUV-F Type

Applicable to Simultaneous Cleaning of Both Sides,
Yet Economical and Space-saving Blower Unit!

An enhanced cleaner design with Vacuum, Ultrasonic Pressure, Vacuum head, based on our patented UV head with an additional vacuum chamber. This system outperforms similar cleaners with its increased ultrasonic output power.


Features
  1. 100% removal of particles down to 3 μm.
  2. Two cleaners can be mounted for simultaneous cleaning of both sides thanks to unique air balance design.
  3. Non-contact system causes no adverse effects such as scratches or damage to the material.
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Principle
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Cleaning Test and Results

The test was conducted in our Class 100 Clean Room.
The test results show that particles of 3μm spacer beads were 100% removed at operating pressure of 14 kPa.


Test details

Substrate : glass for LCD(250mm x 250mm x 1.1t)
Particles : 3μm spacer beads (sprayed on dry)
Line speed : 50mm/sec
Evaluation : Surface tester (GI-4600)

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