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Cleanig System

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VUV-HG Type/ Ultrasonic High Pressure Cleaner for Flat Materials
VUV-HG Type

3 micro meter particles can be removed.
Ideal for edge area cleaning.

CCD, C-MOS, IC Package, LCD module and so on.


Features
  1. Higher pressure ultrasonic air (10 times of our conventional cleaners) removes fine (3micro meters and over) and slightly sticky particles and glass curettes. Also best suitable for edge area cleaning.
  2. Compact cleaner head design; W84 x D55 x H50mm (effective cleaning width 10mm)
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Principle
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Cleaning Test and Results

Test conducted at Shinko Co., LTD class 100 clean room in Osaka, Japan


Test details

Substrate : Glass panel for LCD
Particles : 3 micro meter dry silicone spacer beads sprayed
Pressure air : 0.1MPa
Substrate / Cleaner gap : 1.5mm
Evaluation method : Hitachi Surface Inspection Device (GI-4600)

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