VUV-W Type | Cleaning System | Products

LINEUP

UVU-F

VUV-F & VUV-F-HE

NSHV-F

VUV-HG

VUV-F1･F2･F3･
F2S･F3S

VUV-W & VUV-W-HE

AIR TYPE SUCTION
CLEANER(SA TYPE)

CLEANER OF STEEL PLATE

Realizing less blower motor capacity, less footprint and, above all, less investment cost.

Unique profile of VUV-W enables collecting all the particles, blown by ultrasonic air, with the suction nozzles located at the both side of an ultrasonic discharge air nozzle. Further it enables using less blower motor capacity in comparison with existing models so that realize significant cost reduction at the time of introduction as well as at actual production.

Features

Cleaning performance is effectively improved by unique profile of VUV-W.
Ultrasonic discharge air nozzle is located at the center of cleaning head that enables air discharge direction vertically to the substrate (*Air knife effect) while suction nozzles are located at the both side of an ultrasonic discharge air nozzle to avoid air leakage and also collect all the blown particles.

Principle

Cleaing Test and Results
The test was conducted in our Class 100 Clean Room. The test results show that particles of 3 μm spacer beads were 100% removed at operating pressure of 12 kPa.	Test details Material : PET film Particles : 3 μm floating particles Pressure range : 12 kPa Gap between material and cleaner : Approx. 2 mm Line speed : 200 mm/sec Evaluation method : Microscopic photos