PEN-G & S Type | Cleaning System | Products

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VUV-F & VUV-F-HE

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VUV-F1･F2･F3･
F2S･F3S

PEN-G&S

AIR TYPE SUCTION
CLEANER(SA TYPE)

CLEANER OF STEEL PLATE

3 micro meter particles can be removed.
Ideal for local spot cleaning and for use in limited space.
Flexible use by manual and fixed installation.

▼　Principle

▼　Cleaning Test and Results

Principle

Cleaning Test and Results

Test conducted at Shinko Co., LTD class 100 clean room in Osaka, Japan

Test details

Substrate : Glass panel
Particles : 3 micro meter dry silicone spacer beads
Pressure air : 0.25MPa
Substrate / Cleaner gap : 13.5mm
Evaluation method : Hitachi Surface Inspection Device (GI-4600)

3 micro meter particles can be removed. Ideal for local spot cleaning and for use in limited space. Flexible use by manual and fixed installation.

3 micro meter particles can be removed.
Ideal for local spot cleaning and for use in limited space.
Flexible use by manual and fixed installation.