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Cleanig System

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PEN-G&S Type Ultrasonic Spot Cleaner
PEN-G&S Type

3 micro meter particles can be removed.
Ideal for local spot cleaning and for use in limited space.
Flexible use by manual and fixed installation.

 Principle

 Cleaning Test and Results

Principle
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Cleaning Test and Results

Test conducted at Shinko Co., LTD class 100 clean room in Osaka, Japan


Test details

Substrate : Glass panel
Particles : 3 micro meter dry silicone spacer beads
Pressure air : 0.25MPa
Substrate / Cleaner gap : 13.5mm
Evaluation method : Hitachi Surface Inspection Device (GI-4600)

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