PRODUCTS
Ultrasonic Dry Cleaner VUV
- Ultrasonic
- Non-Contact
- # Web｜film_paper_metallic-foil
- # Flat-substrate
- # Semiconductor
- # Battery
- # PCB_FPCB
- # Automobile
- Non-contact ultrasonic cleaner with both
high performance and low running cost - Removes 100% of particles down to 3.0 μm
- A non-contact system that does not affect
the substrate surface - No deterioration of ultrasonic performance
For Roll-to-Roll Process(such as films)
For flat substrates
01Figure
02Test results
- Substrate
- Glass
- Pressure
- 14 kPa
- Particles
- 3 μm spacer beads
- Distance between
the cleaning head and substrate - 1.5mm
- Line speed
- 200m/sec
Before cleaning
After cleaning
Test results in SHINKO’s clean room. The removal rate may change depending on the particle type and test conditions.
03Applications
Film
Glass
Rechargeable
Battery
LCD/OLED
PCB/FPCB