PRODUCTS
Ultrasonic Spot Cleaner PEN-G / PEN-S
- High Pressure
- Ultrasonic
- Non-Contact
- # Spot
- # Semiconductor
- Handy-type cleaner using ultrasonic air
- Ideal for local spot cleaning
![PEN-G:ハンディ(ガン)タイプ PEN-S:固定タイプ](/wp/wp-content/themes/shinkyo/images/product/pen-g_s/img_01.jpg)
PEN-G: Handy (gun) type
PEN-S: Fixed type
01Figure
![Figure](/wp/wp-content/themes/shinkyo/images/product/pen-g_s/composition-en.jpg)
02Test results
- Substrate
- Glass
- Pressure
- 0.25MPa
- Particles
- 3μm spacer beads
- Distance between
the cleaning head and substrate - 13.5mm
Glass surface inspection device (GI-4600) measurement data
![Before cleaning](/wp/wp-content/themes/shinkyo/images/product/pen-g_s/result_img01.jpg)
Before cleaning
![After cleaning](/wp/wp-content/themes/shinkyo/images/product/pen-g_s/result_img02.jpg)
After cleaning
Test results in SHINKO’s clean room. The removal rate may change depending on the particle type and test conditions.
03Applications
![Semiconductor](/wp/wp-content/themes/shinkyo/images/product/purpose_05.jpg)
Semiconductor