PRODUCTS
Ultrasonic dry cleaner for simultaneous cleaning on both sides
VUV-F2 /
VUV-F3
- Ultrasonic
- Non-Contact
- # Flat-substrate
- # LCD_OLED
- Succeeded in the world’s first simultaneous cleaning of both sides of a 0.2 mm thin glass substrate
- Removes 100% of particles down to 3.0 μm
VUV-F2 For thin type (0.4t or more)
VUV-F3 For ultra-thin type (less than 0.4t)
01Figure
02用途（例）
Glass
LCD/OLED