PRODUCTS
Ultrasonic Spot Cleaner PEN-G / PEN-S
- High Pressure
- Ultrasonic
- Non-Contact
- # Spot
- # Semiconductor
- Handy-type cleaner using ultrasonic air
- Ideal for local spot cleaning
PEN-G: Handy (gun) type
PEN-S: Fixed type
01Figure
02Test results
- Substrate
- Glass
- Pressure
- 0.25MPa
- Particles
- 3μm spacer beads
- Distance between
the cleaning head and substrate - 13.5mm
Glass surface inspection device (GI-4600) measurement data
Before cleaning
After cleaning
Test results in SHINKO’s clean room. The removal rate may change depending on the particle type and test conditions.
03Applications
Semiconductor